Transfer device

ABSTRACT

The present invention relates to a transfer device that can feed a work in a stable condition without applying it any excess loads. The transfer device for feeding a tape-shaped work to a process stage standing in an upright position, which is placed on one side of the process stage and which includes a supply reel, a take-up reel and a work feeding mechanism. Specifically, the supply reel, around which the work and a protective sheet are wound, is adapted to feed the work and the protective sheet therefrom. The take-up reel is adapted to wind the work and the protective sheet that have been fed from the supply reel, and it is located below the supply reel. The work feeding mechanism is adapted to forward the work from the supply reel to the take-up reel through the process stage.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a transfer device for handlingfilm-shaped works. More specifically, the present invention is directedto a transfer device that feeds a film-shaped work from a supply sectionto a winding section through a process stage.

2. Description of the Related Art

Generally, as handy electronic devices including portable phones andmobile devices are becoming compact, their electric circuit boards areshrinking. Accordingly, current material sources (or works) for circuitboards tend to shift from a thick hard type to a thin tape-shaped type.

A typical tape-shaped work had a thickness of about 0.1 mm a few yearsago, but it is now about 0.06 mm thick. Furthermore, works having athickness of 0.05 mm or less and a width of 100 mm to 250 mm are highlyin demand.

When an electronic circuit board is formed from such a tape-shaped work,the work may be loosened and its side edges may be warped while the workis being fed by a transfer device. In order to overcome thisdisadvantage, a mechanism of JP2836787 has been known. This mechanism isequipped with a lateral transfer device for allowing a work to behandled stably.

This lateral transfer device is built in an exposure device, and isconfigured to feed a tape-shaped work for each block laterally in orderfor the device to transfer patterns on a mask to the surface of the workduring an exposure process.

However, if a work is fed laterally, it is likely to be loosened due toits weight. In order to prevent this, a holding mechanism of JP2836787has been conceived. This holding mechanism has pairs of rollers forpinching a work so as to adjust a tension of the work.

On the other hand, a general transfer device has a curved transfer routeand, therefore needs to prevent excess loads from being applied to awork at curved portions. JP2836787 discloses a transfer device equippedwith an air dancer for adjusting a tension of a work. With this airdancer, the work can be fed to an exposure stage and fixed there, whilethe work does not undergo any extra tension.

A typical exposure device (for example, one disclosed by JP2836787)employs a lateral transfer system by which a work is fed laterally, andit is exposed to light in a horizontal position. However,JP-A2005-326550 and JP-A2005-91903 and JP-A2798158 disclose a verticaltransfer system for feeding a work vertically in order to increase thepatterning resolution by preventing contaminants in the air from beingadhered to the surface of the work and/or a mask.

The mechanism of JP-A2005-326550, JP-A2005-91903 or JP2798158 usesrollers for supplying a work to an exposure stage.

In addition, a turning device that curves a feeding route of a work inorder to feed the work to a process stage appropriately has been known.An example of such a turning device is disclosed by JP2788207. Thisturning device floats a work by means of air blown from a jet tip formedon a thin plate on a surface of a fixed shaft, and feeds it at corners.

Typically, a protective sheet having the same size as that of a work isput on a tape, and they are wound around a reel together. This sheet isaimed at preventing contaminants from being adhered to the surface ofthe work, or leads of electric components mounted on the work from beingbent or damaged.

However, the protective sheet is unnecessary during an exposure process.Accordingly, a typical transfer device removes a protective sheet from awork while it is being fed from a supply reel, and feeds only the tapeto a process stage. Subsequently, another protective sheet is put on theprocessed work, while the work is being wound around a take-up reel.

FIG. 13 schematically shows a transfer device as disclosed by JP3663421,JP-A2004-193259 or JP-A2005-93958.

Referring to this drawing, a transfer device 1100 includes:

1) a supply reel 1101 around which both a tape T1 and a protectivesheet. S1 are wound;2) a take-up reel 1102 that winds the tape T1 fed from the supply reel1101;3) another take-up reel 1103 that winds the protective sheet S1 fed fromthe supply reel 1101;4) another supply reel 1104 around which a protective sheet S2 that isto be put on the tape T1 is wound; and5) a process section 105 positioned between the supply reel 1101 and thetake-up reel 1102. Only the tape T1 is subjected to a process at theprocess section 105, because the protective sheet S1 is fed separatelyand away from the tape T.

The transfer device 1100 is configured to adjust the tension of theprotective sheet S1, while the protective sheet S1 is being wound aroundthe take-up reel 1103.

Specifically, (1) JP3663421 discloses the nip rollers between the supplyreel 1101 and the take-up reel 1103.

(2) JP-A2004-193259 discloses a motor coupled to a driving shaft of thetake-up reel 1103 through a clutch.

(3) JP-A2005-93958 discloses a spring for applying an elastic force tothe protective sheet S2.

FIG. 14 schematically shows another transfer device as disclosed byJP-A2005-5586.

Referring to this drawing, a transfer device 1200 includes:

a supply reel 1201 around which both a tape T1 and a protective sheet S1are wound;

a take-up reel 1202 that winds the tape T1 and the protective sheet S1which are both fed from the supply reel 1201;

a transfer system 1203 that feeds the tape T1 from the supply reel 1201to the take-up reel 1202;

a transfer system 1204 that feeds the protective sheet S1 from thesupply reel 1201 to the take-up reel 1202; and

an inspection device 1205 provided in the transfer system 1203.

In this device 1200, both the tape T1 and the protective sheet S1 arefed from the supply reel 1201, and they are forwarded by the transfersystems 1203 and 1204, respectively. In addition, only the tape T1 issubjected to a test by the inspection device 1205.

However, the above-described transfer devices have the followingdisadvantages.

The transfer device of JP2836787 discloses the air dancer for preventinga work fed from the supply reel from being loosened due to its weightand from undergoing excess tensions.

However, in a transfer device of this type, a work is kept in ahorizontal position on an exposure stage, and the work is brought intocontact with the mask. Therefore, as becoming wider, the work is morelikely to be loosened. Thus, it is difficult for the transfer device toprevent the looseness of a wide work.

Furthermore, the mask and the work are brought into contact with eachother or are placed close to one another. Hence, contaminations may beadhered to the surfaces of the mask and the work because of staticelectricity. This may cause the deterioration of the patterningresolution.

The transfer device of JP-A2005-326550, JP-A2005-91903 or JP2798158discloses the pairs of rollers for pinching a work before and after theexposure stage. With this device, the mask, optical system and work arealigned easily, but the work is prone to undergo excess loads from therollers.

Moreover, the transfer device as shown in FIG. 13 needs the take-up reel1103 dedicated for winding the protective sheet S1 fed from the supplyreel 1101. In addition, the nip roller, clutch and spring for adjustingthe tension of the protective sheet S1 on the take-up reel 1103 are alsorequired. Thus, this transfer device must be equipped with manyaccessory members. Moreover, the supply reel 1104 is installed near thetake-up reel 1102. This installing process can be troublesome.

In the transfer device as shown in FIG. 14, the protective sheet S1 fedfrom the supply reel 1201 is directly wound by the take-up reel 1202.Therefore, any accessory members are unnecessary. However, the supplyreel 1201, inspection device 1205 and take-up reel 1202 are arrangedlaterally. This arrangement leads to the enlargement of the device.Accordingly, a large area must be ensured for installing such anenlarged device.

Furthermore, in the transfer device 1200 as shown in FIG. 14, thetransfer system 1204 is positioned above the inspection device 1205. Inthis structure, contaminants on the protective sheet S1 may fall down tothe working area of the inspection device 1205.

Moreover, the transfer device 1200 discloses the transfer systems 1203and 1204. The system 1203 loosens the tape T1 between the supply reel1201 and the inspection device 1205 and between the inspection device1205 and the take-up reel 2002 in order to adjust the tension of thetape T1. Meanwhile, the transfer system 1204 adjusts the tension ofprotective sheet S1 near the take-up reel 1202. Since bothtension-adjusting methods are quite different, it is difficult for thedevice 1200 to run the tape T1 and the protective sheet S1 in sync witheach other. As a result, the take-up reel 1202 may fail to wind them inbalance.

Taking the above disadvantages into account, the present invention hasbeen conceived. An object of the present invention is to provide atransfer device that can feed a work in a stable condition withoutapplying it any excess loads. An additional object of the presentinvention is to present a transfer device capable of winding a work anda protective sheet in balance.

SUMMARY OF THE INVENTION

According to a first aspect of the present invention, there is provided,a transfer device for feeding a tape-shaped work to a process stagestanding in an upright position, the transfer device being placed on oneside of the process stage, the transfer device including:

a1) a supply reel around which the work and a protective sheet arewound, the supply reel for feeding the work and the protective sheettherefrom;a2) a take-up reel for winding the work and the protective sheet thathave been fed from the supply reel, the take-up reel being located belowthe supply reel; anda3) a work feeding mechanism for forwarding the work from the supplyreel to the take-up reel through the process stage.

With this transfer device, the work can be moved on the process stageeasily, because the process stage is provided in an upright position.

According to a second aspect of the present invention, there isprovided, a transfer device for feeding a tape-shaped work that is to besubjected to a process on a process stage standing in an uprightposition, the transfer device including:

b1) a supply reel rotating section for feeding the work by rotating asupply reel around which the work is wound;b2) first and second supply guide rollers for guiding the work fed fromthe supply reel rotating section;b3) a supply slack absorber for adjusting a tension of the work betweenthe first and second supply guide rollers, the supply slack absorberbeing located therebetween;b4) first and second transfer rollers for feeding, along the processstage, the work fed from the second supply guide roller, the first andsecond transfer rollers being arranged above and below the processstage, respectively;b5) first and second take-up guide rollers for guiding the work fed fromthe second transfer roller;b6) a take-up slack absorber for adjusting a tension of the work betweenthe first and second take-up guide rollers, the take-up slack absorberbeing located therebetween; andb7) a take-up reel rotating section for winding the work fed from thesecond take-up guide roller by rotating a take-up reel.

Further, the supply reel rotating section is located higher than thefirst supply guide roller. The second supply guide roller is located ashigh as or lower than the first supply guide roller, and higher than thefirst transfer roller. The take-up reel rotating section is locatedhigher than the second take-up guide roller. The second take-up guideroller is located as high as or higher than the first take-up guideroller, and lower than the take-up reel rotating section.

This transfer device feeds the tape-shaped work from the supply reel tothe supply slack absorber by using the take-up reel rotating section andthe first supply guide roller and, then feeds it to the process stage byusing the second supply guide roller, the first and second transferrollers, and the first take-up guide roller. Furthermore, the transferdevice winds the work from the take-up slack absorber by using thesecond take-up guide roller and the take-up reel rotating section. Thefirst and second transfer rollers feed the work for each block atpredetermined intervals, while sucking the work onto the roller surfacethrough the absorbing holes.

The device feeds the work obliquely downward from the supply reelrotating section to the first transfer roller. Moreover, the devicefeeds the work obliquely upward from the second transfer roller to thetake-up reel rotating section. Hence, the work is prevented from beingloosened due to its weight.

According to a third aspect of the present invention, there is provided,the transfer device according to the second aspect in which each of thesecond supply guide roller and the first take-up guide roller includes awork position adjuster for displacing the work on its rotational axis,based on a misaligned amount of the work on the process stage.

With this transfer device, the work can be positioned on the processstage with precision

According to a fourth aspect of the present invention, there isprovided, the transfer device according to the second aspect in whicheach of the first transfer roller and the second transfer roller has aroller main body made of synthetic resin.

With this transfer device, slight vibrations of the work can be absorbedby the roller main bodies of the first and second transfer rollers.

According to a fifth aspect of the present invention, there is provided,the transfer device according to the second aspect, further including aremovable work connection mechanism for connecting a tail end of thework in course of a process on the process stage and a front end ofanother virgin work, the work connection mechanism being providedbetween the supply reel rotating section and the first supply guideroller.

With this transfer device, the tail end of the work that is beingprocessed and the front end of the other work can be connected.

According to a sixth aspect of the present invention, there is provided,the transfer device according to the second aspect in which the processstage includes an exposure stage on which patterns formed on a mask aretransferred to a surface of the work fed for each block by the transferdevice.

With this transfer device, the patterns on the mask can be transferredto the surface of the work stably, while the work is fed to the exposurestage for each block.

According to a seventh aspect of the present invention, there isprovided, the transfer device according to a sixth aspect in which whenthe work is misaligned with a predetermined position on the processstage by a threshold or less, the misaligned amount is adjusted tosubstantially zero by displacing the mask, and when the work ismisaligned with the predetermined position on the process stage by morethan the threshold, each of the second supply guide roller and the firsttake-up guide roller is displaced on its rotational axis.

With this transfer device, a period during which the mask is alignedwith the work is shortened, because the misaligned amount between themask and the work is decreased.

According to an eighth aspect of the present invention, there isprovided, the transfer device according to the sixth aspect in whichwhen the work is misaligned with a predetermined position on the processstage by a threshold or less, the misaligned amount is adjusted tosubstantially zero by displacing the mask, and when the work ismisaligned with the predetermined position on the process stage by morethan the threshold, an amount at which the first and second transferrollers feed the work is adjusted.

This transfer device adjusts the amount at which the first and secondtransfer rollers feed the work to an area to be processed on theexposure stage once. By this, the misaligned amount can be decreased.Hence, a period during which the mask is aligned with the work isshortened.

According to a ninth aspect of the present invention, there is provided,the transfer device according to the second aspect in which each of thefirst and second transfer rollers includes a plurality of absorbingholes and an absorbing mechanism coupled to the absorbing holes, and thework is sucked onto the absorbing holes by the absorbing mechanism.

With this transfer device, the work can be fed precisely, because thework does not slip over the roller surfaces of the first and secondtransfer rollers.

According to a tenth aspect of the present invention, there is provided,the transfer device according to the second aspect in which each of thefirst and second supply guide rollers and the first and second take-upguide rollers includes a plurality of absorbing holes and an absorbingmechanism coupled to the absorbing holes, and the work is sucked ontothe absorbing holes by the absorbing mechanism.

With this transfer device, the work can be fed from the supply reel tothe tale-up reel smoothly, because the work does not slip over theroller surfaces of the first and second supply guide rollers and thefirst and second take-up guide rollers.

According to an eleventh aspect of the present invention, there isprovided, a transfer device for feeding a tape-shaped work to a processstage standing in an upright position, the transfer device being locatedon one side of the process stage, said transfer device including:

c1) a supply reel around which the work and the protective sheet arewound, the supply reel for feeding the work and the protective sheettherefrom;c2) a take-up reel for winding the work and the protective sheet thathave been fed from the supply reel, the take-up reel being located belowthe supply reel;c3) a work feeding mechanism for feeding the work from the supply reelto the take-up reel through the process stage; andc4) a protective sheet feeding mechanism for feeding the protectivesheet from the supply reel to the take-up reel, the protective sheetbeing forwarded on the side opposite to the process stage with respectto the supply reel.

In this transfer device, the work is fed from the supply reel to thetake-up reel by the work feeding mechanism. At the same time, theprotective sheet is fed from the supply reel to the protective sheet bythe protective sheet feeding mechanism. In other words, the work and theprotective sheet are fed from the supply reel to the take-up reelseparately. Therefore, a reel dedicated for winding the protective sheetis unnecessary.

Since the take-up reel is located below the supply reel, the laterallength of the transfer device is shortened, thereby making the devicecompact.

Moreover, the protective sheet is fed from the supply reel to thetake-up reel while being away from the process stage. Hence, even ifcontaminants are adhered to the surface of the protective sheet, thecontaminants do not fly to the process stage.

According to a twelfth aspect of the present invention, there isprovided, the transfer device according to the eleventh aspect in whichthe protective sheet feeding mechanism is provided with a protectivesheet tension adjuster including:

d1) a first roller for guiding the protective sheet from the supplyreel;d2) a second roller for guiding the protective sheet to the take-uproller; andd3) a first air dancer for adjusting a tension of the protective sheetbetween the first roller and the second roller.

With this transfer device, the protective sheet can be fed, while theprotective sheet tension adjuster maintains the tension of theprotective sheet a proper value.

According to a thirteenth aspect of the present invention, there isprovided, the transfer device according to the eleventh aspect in whicha route on which the work is fed from the supply reel to the take-upreel through the process stage makes a closed loop, and a route on whichthe protective sheet is fed from the supply reel to the take-up reelmakes a closed loop.

With this transfer device, a reel dedicated for winding the protectivesheet can be omitted.

According to a fourteenth aspect of the present invention, there isprovided, the transfer device according to the eleventh aspect furtherincluding a first sensor for sensing a position of side edges of thework fed from the process stage to the take-up reel, and a second sensorfor sensing a position of side edges of the protective sheet fed fromthe supply reel to the take-up reel. In addition, the side edges of thework are aligned with those of the protective sheet, based on sensingresults of the first and second sensors, and the work and the protectivesheet are then wound by the take-up reel.

With this transfer device, the work and the protective sheet can bewound around the take-up reel, while they are aligned.

According to a fifteenth aspect of the present invention, there isprovided, the transfer device according to the eleventh aspect in whichthe work feeding mechanism includes a first tension adjuster whichadjusts a tension of the work between the supply reel and the processstage and which is placed therebetween, and a second tension adjusterwhich adjusts a tension of the work between the process section and thetake-up reel and which is placed therebetween. In addition, the firsttension adjuster includes a third roller for guiding the work fed fromthe supply reel, a fourth roller for guiding the work to the processstage, and a second air dancer for adjusting the tension of the workbetween the third roller and the fourth roller. Furthermore, the secondtension adjuster includes a fifth roller for guiding the work from theprocess stage, a sixth roller for guiding the work to the take-up reel,and a third, air dancer for adjusting the tension of the work betweenthe fifth roller and the sixth roller.

With this transfer device, the tape can be fed while its tension is keptproperly by the first and second tension adjusters.

The transfer device of the present invention attains the ability to feedthe work from the supply reel to the take-up reel through the processstage without pinching or loosening the work. Thus, it is possible forthe transfer device to feed the work without applying excess loads tothe work, and to position it to a predetermined location on the processstage with precision.

Thus, the transfer device of the present invention produces thefollowing effects.

1) The work and the protective sheet are fed from the supply reel to thetake-up reel, while they are aligned. Therefore, any accessory memberssuch as an additional take-up reel are unnecessary.2) Since the take-up reel is located below the supply reel, the transferdevice can be made compact.3) The protective sheet feeding mechanism feeds the protective sheet,while it is away from the process stage. Accordingly, even ifcontaminants are adhered to the surface of the protective sheet, thecontaminants are less likely to fly to the process stage.4) The protective sheet and the work are wound around the take-up reel,while they are aligned.5) Because the tensions of the work and the protective sheet are keptproperly, they are wound in balance.

Other aspects, features and advantages of the present invention willbecome apparent upon reading the following specification and claims whentaken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

For more complete understanding of the present invention and theadvantages hereof, reference is now made to the following descriptiontaken in conjunction with the accompanying drawings wherein:

FIG. 1 is a block diagram illustrating a transfer device according to afirst embodiment of the present invention and a corresponding exposuredevice;

FIG. 2 is a perspective view depicting the transfer device;

FIG. 3 is a cross-section view depicting a first supply guide roller ofthe transfer device;

FIG. 4 is a cross-section view depicting a second supply guide roller ofthe transfer device;

FIG. 5 is a cross-section view depicting a first transfer roller of thetransfer device;

FIG. 6 is a schematic view depicting the transfer device;

FIG. 7 is a flowchart showing an operation of the transfer device;

FIG. 8 is partially enlarged schematic view depicting a modification ofthe transfer device;

FIG. 9 is a perspective view depicting a transfer device according to asecond embodiment of the present invention and a corresponding exposuredevice;

FIG. 10 is a partially schematic view depicting the transfer device andthe exposure device;

FIG. 11 is a cross-section view depicting the guide roller of a transferdevice;

FIG. 12A is a schematic view depicting a modification of the transferdevice and the exposure device;

FIG. 12B is a schematic view depicting another modification of thetransfer device and the exposure device;

FIG. 12C is a schematic view depicting still another modification of thetransfer device and the exposure device;

FIG. 13 is a schematic view depicting a transfer device of prior art;and

FIG. 14 is a schematic view depicting another transfer device of priorart.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS OF THE INVENTION FirstEmbodiment

A description will be given below, of a transfer device according to afirst embodiment of the present invention, with reference to FIGS. 1 to7.

Before describing a transfer device A according to a first embodiment ofthe present invention, an explanation will be given below, of atape-shaped tape T (or work) to be fed by the transfer device A.

(Structure of Tape (Work))

Referring to FIGS. 1 and 2, a tape T is used for an electronic circuitboard, and it is made of a flexible material or a hoop material. Itssize is, for example, 160 mm wide and 200 m long. This tape T is keptwound around a supply reel rotating section 1. In addition, the tape Tmay have perforations (not shown) on both sides.

The transfer device A is configured to feed the tape T. In thisembodiment, the transfer device A is assumed to forward the film-shapedtape T made of a flexible material.

(Structure of Transfer Device)

The transfer device A feeds the tape T to an upright exposure stage 51 a(process stage 51) of an exposure device 5. The tape T is fed at regularintervals, and is subjected to a process for each block by the exposuredevice 5.

This transfer device A is constituted by:

a) the supply reel rotating section 1 for rotating a supply reel B1around which the tape T is wound;b) first and second supply guide rollers 2 and 3 for guiding the tape T;c) first and second transfer rollers 4 and 6 for feeding the tape T,which are arranged above and below the process stage 51, respectively;d) first and second take-up guide rollers 7 and 8;e) a take-up reel rotating section 9 for rotating a take-up reel B2around which the tape T is to be wound; andf) supply and take-up slack absorbers D1 and D2 for adjusting a tensionof the tape T.

[Structure of Supply Reel Rotating Section]

The supply reel rotating section 1 is adapted to feed the tape T fromthe supply reel B1. It is driven by a motor (not shown) The supply reelB1 has a drum of, for example, 750 mm in diameter and is provided withflanges on both sides. The tape T on the supply reel B1 is pulled towardthe first supply guide roller 2 by the first transfer roller 4, and thesupply reel B1 then rotates in conjunction with the first transferroller 4. Consequently, the tape T on the supply reel B1 is fed towardthe first supply guide roller 2.

[Structure of First Supply Guide Roller]

As shown in FIGS. 1 and 2, the first supply guide roller 2 serves as anauxiliary roller for feeding the tape T from the supply reel B1 to thesupply slack absorber D1. The first supply guide roller 2 rotates aboutits rotational axis. The first supply guide roller 2 is positioned lowerthan the supply reel rotating section 1. Due to this arrangement, thetape T having passed the roller 2 is slackened by its weight.

Referring to FIG. 3, the first supply guide roller 2 includes:

a roller main body 21 around which the tape T is to be wound;

a shaft 22 for rotatably supporting the roller main body 21;

a bearing 23 rotatably coupled to the shaft 22; and

a casing 24 for holding the bearing 23.

Note that the second take-up guide roller 8 (see FIG. 2) may have thesame structure as that of this first supply guide roller 2.

[Structure of Supply Slack Absorber]

Referring back to FIGS. 1 and 2, the supply slack absorber D1 is adaptedto adjust a tension of the tape T. The supply slack absorber D1 ispositioned between the first and second supply guide rollers 2 and 3,and contains a portion of the tape T1 which ranges therebetween.Specifically, within the supply slack absorber D1, the tape 1 is beslackened in a U shape due to its weight. Accordingly, the portions ofthe tape T which range between the section 1 and roller 2 and betweenthe rollers 3 and 4 do not undergo an excess tension or are not loosenedgreatly.

The supply slack absorber D1 has a box D1 a, and the tape T runs insidethe box D1 a via the upper opening of the box D1 a while being slackenedin a U shape due to its weight. Specifically, when reaching the upperopening, the tape T is fed downstream, that is, to the interior of thebox D1 a. As a result, the portion of the tape T which resides insidethe box D1 a is slackened due to its weight. Following this, theslackened portion of the tape T is pulled by the first transfer roller 4and is thus fed upward and downstream from the box D1. This box D1 a mayhave a box shape with upper and lower openings and a bottom.

[Structure of Second Supply Guide Roller]

Referring to FIG. 4, the second supply guide roller 3 is adapted to feedthe tape T from the supply slack absorber D1 to the first transferroller 4, and has a work position adjuster 32 for displacing the tape Tin the directions of an arrow “b” (on the rotational axis).

The second supply guide roller 3 is constituted by:

a motor M1;

a casing 33 for holding the motor M1;

a ball screw 34 fixed to a motor shaft M1 a;

a rotatable roller main body 31 for feeding the tape T;

a nut 35 for being displaced on the ball screw 34 in accordance with therotation of the ball screw 34;

a spline shaft 36 for being displaced in conjunction with the nut 35;

a shaft 37 for being displaced in conjunction with the spline shaft 36,and

bearings 38 arranged between the shaft 37 and the roller main body 31.

The work position adjuster 32 is adapted to adjust the position of thetape T which ranges over the process stage 51 by displacing the rollermain body 31 on the rotational axis. This work position adjuster 32 maybe composed of the motor M1, ball screw 34, nut 35, spline shaft 36,shaft 37 and roller main body 31.

The motor M1 of FIG. 4 displaces the roller main body 31 in thedirections of an arrow “a,” while rotating the roller main body 31. Inaddition, the motor M1 rotates clockwise or counterclockwise in responseto signals from a controller 10, thereby displacing the tape T in thedirections of the arrow “b.” The second supply guide roller 3 is held ata predetermined position in the casing 33.

The ball screw 34 is coupled to the motor shaft M1 a of the motor M1,and rotates in conjunction with the motor shaft M1 a. Between the ballscrew 34 and the motor shaft M1 a, a reduction gear mechanism may beprovided. The nut 35 mates with the ball screw 34 and is contained inthe spline shaft 36. The rotation of the ball screw 34 allows the nut 35to displace in the directions of the arrow “a.”

The spline shaft 36 rotates in conjunction with the nut 35, whiledisplacing in the directions of the arrow “a.” The shaft 37 is securedto the bottom of the spline shaft 36, and displaces in conjunction withthe spline shaft 36 while rotating. Both ends of the shaft 37 arereceived by the bearings 38.

The bearings 38 are rotatably attached to the shaft 37, and displace inconjunction with the shaft 37 in the directions of the arrow “a.” Theroller main body 31 serves as a roller on which the tape T is to beslung, and may have a bobbin shape with flanges. It displaces in thedirections of the arrow “a” in conjunction with the bearings 38.Moreover, the roller main body 31 has a roller surface 31 a made ofsynthetic resin in order to absorb slight vibrations. In this case, itis preferable that the roller surface 31 a is made of soft resin thatpossesses buffering property. Alternatively, such soft resin may becoated on the roller surface 31 a.

In the above second supply guide roller 3, the rotation of the motor M1allows the ball screw 34, spline shaft 36, shaft 37 and bearings 38 torotate and displace. As a result, the roller main body 31 displaces onthe rotational axis, whereby the position of the tape T on therotational axis is changed. This enables the tape T to be set on theprocess stage 51 appropriately.

Alternatively, the second supply guide roller 3 may have a structurethat the motor M1 rotates the shaft 37 only. In this case, the secondsupply guide roller 3 needs to be displaced by a different motor or alinear slide mechanism, etc.

Note that the first take-up guide roller 7 (see FIG. 2) may have thesame structure as that of the above second supply guide roller 3.

[Structure of First Transfer Roller]

Referring to FIG. 5, the first transfer roller 4 is adapted to feed thetape T from the second supply guide roller 3 to the exposure stage 51 a(process stage 51). It is rotated at regular intervals by the motor M2,thereby feeding the tape T for each block. This first transfer roller 4includes multiple absorbing holes 41 b and an absorbing mechanism 42which both are configured to draw the tape T onto the roller surface 41a of the roller main body 41. With these members, the tape T can be fedwithout slipping over the first transfer roller 4.

Furthermore, the first transfer roller 4 includes:

the motor M2 for rotating the roller main body 41;

a casing 43 for supporting the motor M2 and a motor shaft M2 a;

a rotational shaft 44 that is attached to a motor shaft M2 a and thathas an absorbing path 44 a in the absorbing mechanism 42; and

an exhaustion section 45 to be coupled to a vacuum pump (not shown) viathe rotational shaft 44.

Referring back to FIG. 1, the first transfer roller 4 is placeddownstream of the supply slack absorber D1. In addition, it ispositioned immediately above the exposure stage 51 a, so that the tape Tis set parallel to the exposure stage 51 a.

The roller main body 41 as shown in FIG. 5 is a hollow rotatable bodywhich is fixed to the rotational shaft 44 and which has a bobbin shapewith flanges. The roller surface 41 a of the roller main body 41 may bemade of soft synthetic resin having buffering property for the purposeof absorbing slight vibrations of the tape T. The roller surface 41 ahas many absorbing holes 41 b thereon. Since air flows through thoseabsorbing holes 41 b, the tape T cools down the roller surface 41 a. Theroller surface 41 a may be made of stainless steel or made by twistingstainless wires.

The absorbing mechanism 42 is adapted to bring the tape T into contactwith the roller surface 41 a by drawing it thereto using the vacuum pump(not shown). The absorbing mechanism 42 includes the absorbing holes 41b for absorbing air, a roller inner area 41 c through which the airflows, the absorbing path 44 a communicating with the roller inner area41 c, the exhaustion section 45 and the vacuum pump (not shown).

As described above, the first transfer roller 4 includes the roller mainbody 41 and the absorbing mechanism 42, and it feeds the tape T smoothlywhile keeping it into contact with the roller surface 41 a by means ofnegative pressure.

The motor M2 as shown in FIG. 5 is adapted to rotate the roller mainbody 41 in order to feed the tape T from the roller main body 41. Themotor M2 is electrically connected to the controller 10, and iscontrolled thereby (see FIG. 1). The casing 43 is adapted to support themotor M2 and the motor shaft M2 a at respective predetermined locations,so that the first transfer roller 4 is positioned at a predeterminedheight (see FIG. 1).

The rotational shaft 44 has a function of transmitting the rotationalpower of the motor M2 to the roller main body 41 in order to rotate it,and supplying air in the roller main body 41 to the vacuum pump (notshown). One end of the rotational shaft 44 is coupled to the motor shaftM2 a, and the other is coupled to the exhaustion section 45 of theabsorbing mechanism 42. The rotational shaft 44 has, at its center,suction holes 44 b for drawing air into the roller main body 41. At theend of the absorbing path 44 a, a discharge hole 44 c for exhausting theair to the exhaustion section 45 is formed. The rotational shaft 44 hasa hollow area ranging between the suction holes 44 b and the dischargehole 44 c.

The vacuum pump (not shown) serves as a negative pressure generator. Itis connected to the exhaustion section 45 via a pipe or a leak valve.Therefore, the vacuum pump sucks air onto the roller surface 41 a viathe absorbing path 44 a and the absorbing holes 41 b, or draws the tapeT onto the roller surface 41 a by means of negative pressure.

Note that the second transfer roller 6 may have the same structure asthat of this first transfer roller 4.

[Structure of Process Stage]

Now, the process stage 51 as shown in FIG. 2 will be described blow. Theprocess stage 51 is located immediately below the first transfer roller4, and gives the tape T fed from the first transfer roller 4 to apredetermined process. The process stage 51 is located parallel to theportion of the tape T which ranges between the first and second transferrollers 4 and 6. In this embodiment, the process stage 51 is representedby the exposure stage 51 a on which the exposure device 5 conducts anexposure process. The exposure stage 51 a has the absorbing holes forholding the tape T.

[Structure of Second Transfer Roller]

The second transfer roller 6 is located immediately below the exposurestage 51 a and downstream thereof. It feeds the tape T having beensubjected to the exposure process on the exposure stage 51 a. The secondtransfer roller 6 may have the same structure as the first transferroller 4 as shown in FIG. 5. Specifically, as shown in FIG. 2, thesecond transfer roller 6 may include the absorbing mechanism 62 fordrawing the tape T onto the roller surface 61 a of the roller main body61, and the motor M3 for rotating the roller main body 61.

[Structure of First Take-Up Guide Roller]

The first take-up guide roller 7 is adapted to forward the tape T fedfrom the second transfer roller 6 to the take-up slack absorber D2. Thefirst take-up guide roller 7 may have the same structure as the secondsupply guide roller 3 as shown in FIG. 4. Specifically, as shown in FIG.2, the first take-up guide roller 7 may include a work position adjuster72 for displacing the tape T on the rotational shaft, and a motor M4that is a power source for the work position adjuster 72.

[Structure of Take-Up Slack Absorber]

The take-up slack absorber D2 is placed to contain the portion of thetape T which ranges between the first and second take-up guide rollers 7and 8. The take-up slack absorber D2 adjusts the tensions of the tape Tbetween the rollers 6 and 7 and between the roller 8 and the take-upreel B2. The first take-up guide roller 7 is located upstream of thetake-up slack absorber D2, while the second take-up guide roller 8 islocated downstream thereof. The take-up slack absorber D2 may have thesame structure as that of the supply slack absorber D1. Specifically,the take-up slack absorber D2 may have a box D2 a. The tape T that isfed by the first take-up guide roller 7 enters the take-up slackabsorber D2. Following this, it slackens in a U shape within the box D2a due to its weight, and it then goes out of the take-up slack absorberD2 by being fed to the second take-up guide roller 8.

[Structure of Second Take-Up Guide Roller]

As shown in FIG. 2, the second take-up guide roller 8 serves as anauxiliary roller for guiding the tape T to the take-up reel B2. It mayhave the same structure as the first supply guide roller 2 as shown inFIG. 3. This second take-up guide roller 8 is placed at a predeterminedposition by a casing (not shown), and is rotatable about its rotationalaxis. In addition, the second take-up guide roller 8 is placed such thatthe tape T having gone out of the take-up slack absorber D2 is fedobliquely upward.

[Structure of Take-Up Reel Rotating Section]

Referring to FIG. 2, the take-up reel rotating section 9 supports thetake-up reel B2 for winding the tape T having been subjected to theexposure process on the process stage 51. It is rotated about itsrotational axis by a motor (not shown).

(Structure of Exposure Device)

Referring back to FIG. 1, the exposure device 5 is configured totransfer patterns formed on the mask M to the surface of the tape T foreach block. This exposure device 5 mainly includes an optical source 52,a reflector 53, a fly eye lens L, a support unit 54 for supporting themask M, a projection optics (such as the Dyson optics or reducedprojection optics) 55, image pick-up units 56, and the exposure stage 51a. Furthermore, the exposure device 5 includes a camera data input unit57, an image process unit 58, a memory unit 59, the controller 10 and aswitch unit 12.

The optical source 52 emits light of a predetermined wavelength, andincludes a lamp 52 a and an elliptic mirror 52 b for covering the backof the lamp 52 a. The reflector 53 is composed of a plane mirror forreflecting the light from the optical source 52 toward the mask M. Thefly eye lens L adjusts the illumination distribution of the light fromthe reflector 53.

The mask M as shown in FIG. 1 is located opposite the projection optics55 while being supported by the support unit 54. This support unit 54can travel on a plane perpendicular to the optical axis of theprojection optics 55 by a drive mechanism (not shown).

The optical axis of the projection optics 55 is positioned parallel to afloor surface on which the exposure device 5 is installed. The exposurestage 51 a faces the mask M across the projection optics 55. Thisprojection optics 55 is made up of multiple lenses and mirrors.

The image pick-up units 56 as shown in FIG. 1 are composed of CCDcameras, and they can be moved laterally and vertically by a drivingsystem. Each of the CCD cameras captures an alignment mark on the mask Mand an alignment mark on each block of the tape T that is set on theexposure stage 51 a. The exposure stage 51 a is provided with anexhaustion system for drawing the tape T through the absorbing holes,and a compressed air system for blowing compressed air.

The camera data input unit 57 receives images of both alignment marksthat have been captured by the image pick-up units 56. The image processunit 58 conducts a process for the alignment marks. Specifically, thisimage process unit 58 converts the images of the alignment marksacquired from the camera data input unit 57 into positional data.Subsequently, the image process unit 58 sends the positional data to thecontroller 10 and to the memory unit 59. The memory unit 59 stores thispositional data (having been captured by the image pick-up units 56 andconverted by the image process unit 58).

The controller 10 includes a CPU, and controls the transfer device A andthe entire exposure device 5. The controller 10 aligns the alignmentmark on the mask M with the alignment mark on each block of the tape T,based on the positional data from the image process unit 58. Thecontroller 10 instructs the drive mechanism (not shown) of the supportunit 54 to move the mask M such that both marks are aligned.

If both alignment marks are misaligned by more than a considerabledistance (threshold 6), then the mask M needs to be moved over a longdistance. Hence, if the misaligned amount exceeds the threshold 6, thenthe controller 10 controls the second supply guide roller 3, firsttransfer roller 4, second transfer roller 6 and first take-up guideroller 7 in such a way that the misaligned amount falls within thethreshold 6.

On the other hand, the controller 10 monitors and controls the positionof the tape T within the supply and take-up slack absorbers D1 and D2,setting of the tape T on the exposure stage 51 a, the movement of theimage pick-up units 56, lighting of the optical source 52, and lightshielding. The switch unit 12 is adapted to turn ON or OFF the motorsM1, M2, M3 and M4 of the transfer device A, the vacuum pump (not shown)and the exposure device 5.

[Arrangement of Members]

Referring to FIG. 6, the supply reel rotating section 1, first supplyguide roller 2, second supply guide roller 3, first transfer roller 4,second transfer roller 6, first take-up guide roller 7, second take-upguide roller 8, take-up reel rotating section 9 are arranged on a singleplane. Furthermore, a line drawn by connecting the section 1 and rollers2 to 4 is substantially parallel to a line drawn by connecting therollers 6 to 8 and the section B2.

The tape T is fed obliquely downward from the supply reel rotatingsection 1 to the first transfer roller 4 as seen from the side.Substantially, the tape T is fed directly downward from the first tosecond transfer rollers 4 and 6. Finally, the tape T is fed obliquelyupward from the second transfer roller 6 to the take-up reel B2.

The supply reel rotating section 1 is placed higher than the firstsupply guide roller 2 by a height H1. The first supply guide roller 2 isplaced obliquely lower than the supply reel rotating section 1, higherthan the opening of the box D1 a of the supply slack absorber D1, andnot lower than the second supply guide roller 3. The supply slackabsorber D1 is placed high enough to contain the slack of the tape Tbetween the first and second supply guide rollers 2.

The second supply guide roller 3 is placed higher than the firsttransfer roller 4 by a height H2 and not higher than the first supplyguide roller 2.

The first transfer roller 4, exposure stage 51 a, second transfer roller6 are aligned vertically. A feeding route of the tape T is curved at thefirst transfer roller 4, and the tape T is made to reach the exposurestage 51 a.

The exposure stage 51 a is located in the middle of the first and secondtransfer rollers 4 and 6. The second transfer roller 6 is placeddirectly below the exposure stage 51 a. The feeding route of the tape Tis curved at the second transfer roller 6.

The first take-up guide roller 7 is located downstream of the secondtransfer roller 6, higher than the roller 6 by a height H3, and higherthan the opening of the take-up slack absorber D2.

The second take-up guide roller 8 is located not lower than the firsttake-up guide roller 7, lower than the take-up reel rotating section 9by a height H4, and higher than the box D2 a of the take-up slackabsorber D2. The take-up reel rotating section 9 is located obliquelyabove the second take-up guide roller 8.

(Operation of Transfer Device)

FIG. 7 shows a flowchart of an operation of the transfer deviceaccording to the first embodiment of the present invention.

An operator sets the virgin tape T on the transfer device A, as shown inFIGS. 1 and 2. Specifically, the supply reel B1 around which the virgintape T is wound is set on the supply reel rotating section 1. Then, anoperator pulls an end of the tape T, and strings the tape T around therollers 2, 3 and 4. Subsequently, an operator passes the tape T throughthe exposure stage 51 a. Following this, an operator strings the tape Taround the rollers 6, 7 and 8, and then couples the end of the tape T tothe take-up reel B2 in the take-up reel rotating section 9. Finally, anoperator loosens the tape T in a U shape within the boxes D1 a and D2 aof the supply and take-up slack absorbers D1 and D2, respectively. Now,setting of the tape T is over.

An operator turns ON the switch unit 12. Then, both the exposure device5 and the transfer device A are activated (step S1). Subsequently, anoperator turns ON the lamp 52 a in the exposure device 5 (step S2). Inthis situation, the light from the lamp 52 a is still blinded by ashutter mechanism (not shown). The motors M2 and M3 of the first andsecond transfer rollers 4 and 6, respectively, are driven, and thevacuum pump (not shown) operates. As a result, the tape T is fed foreach block while being sucked onto the roller surfaces 41 a and 61 a.

The tape T on the supply reel B1 in the supply reel rotating section 1is fed by the first and second transfer rollers 4 and 6, as shown inFIG. 2 (step S3).

The tape T is fed obliquely downward from the supply reel rotatingsection 1, is made to pass the first supply guide roller 2 while itsweight is being applied thereto, and to pass through the interior of boxD1 a of the supply slack absorber D1 (step S4).

The tape T is slackened in a U shape within the supply slack absorber D1due to its weight. The supply slack absorber D1 adjusts the tension ofthe tape T between the supply reel rotating section 1 and the firsttransfer roller 4 (step S5).

Specifically, in the box D1 a of the supply slack absorber D1, theportion of the tape T which is slung from the first supply guide roller2 is pulled in the direction of an arrow “e” due to its weight, as shownin FIG. 6. Accordingly, portion of the tape T which ranges between thesupply reel rotating section 1 and the first supply guide roller 2 isprevented from being loosened.

Furthermore, while being pulled by the first transfer roller 4, the tapeT is fed from the interior of the box D1 a to the second supply guideroller 3 (in the direction of an arrow “d).” In this situation, the tapeT is pulled in the direction of an arrow “f” due to its weight. In otherwords, the portion of the tape T which ranges between the second supplyguide roller 3 and the first transfer roller 4 is pulled in thedirections of the arrows “d” and “f.” Therefore, the portion of the tapeT which ranges therebetween is prevented from being loosened.

In addition, since being fed obliquely downward between the section 1and the roller 2 and between the rollers 3 and 4, the tape T is lesslikely to be loosened. The tape T is fed while being sucked onto theroller surface 41 a by the absorbing mechanism 42. Hence, the feedingroute of the tape T is curved at the first transfer roller 4. In thiscase, since being made of synthetic resin, the roller surface 41 a canabsorb the vibration of the tape T.

The tape T fed by the transfer device A is sucked onto the exposurestage 51 a, and the portion of the tape T which corresponds to one blockis set on the exposure stage 51 a. The image pick-up units 56 movebetween the projection optics 55 and the exposure stage 51 a, andcapture the images of the alignment marks (not shown) on the tape T andon the mask M (step S6). Based on the images captured by the imagepick-up units 56, the image process unit 58 determines a misalignedamount therebetween and an orientation tolerance of the tape T, andsends them to the controller 10 (step S7). The controller 10 allows thesupport unit 54 to displace the mask M, based on the determined amountsand tolerance, so that the mask M and the tape T are aligned (step S8)

The portion of tape T which has been aligned with the mask M istemporally fixed on the exposure stage 51 a while facing the projectionoptics 55 (see FIG. 1). Then, the shutter mechanism (not shown) isopened. The portion of the tape T is exposed to the light from theprojection optics 55, so that the patterns on the mask M are transferredto the surface of portion of the tape T (step S9).

The controller 10 determines whether or not the misaligned amount (atwhich the alignment mark of the tape T is misaligned with that of themask M) falls within the threshold δ (step S10). If the misalignedamount is determined to be less than the threshold δ (“Yes” at the stepS10), then this process proceeds to a step S13. Otherwise (“No” at thestep S10), it proceeds to a step S11. The typical reason why themisaligned amount has a large value is that the portion of the tape Twhich is set on the exposure stage 51 is angled with respect to thefeeding direction. Therefore, if the feeding amount and angled amount ofthe tape T are decreased, then the tape T must be fixed on the exposurestage 51 a precisely. As long as the tape T is fed precisely, then anamount at which the support unit 54 needs to displace the mask M issmall or zero. This leads to the decrease in the throughput of theexposure device 5. For this reason, the controller 10 determines whetheror not the misaligned amount falls within the threshold δ. If themisaligned amount exceeds it, then the process proceeds to the steps S11and S12, and the guide rollers 3 and 7 are controlled to decrease themisaligned amount of the tape T.

The controller 10 sends drive signals to the motors M1 and M4 to therebydisplace the second supply guide roller 3 and the first take-up guideroller 7 on the rotational axes (step S11).

When the controller 10 rotates the motors M1 and M4, the roller mainbodies 31 and 71 are displaced in the directions of the arrow “a” andthe tape T is displaced in the directions of the arrow “b” as shown inFIG. 4. If the second supply guide roller 3 and the first take-up guideroller 7 are displaced in the directions of the arrow “a,” the portionof the tape T which ranges between the first transfer roller 4 and thesecond transfer roller 6 moves in the directions of the arrow “c.”Consequently, the position of the side edges and the angle of the tape Tare corrected.

The controller 10 controls the rotations of the motors M2 and M3,thereby adjusting the feeding amount of the tape T in order to matchboth alignment marks (step S12).

In addition, since the first and second transfer rollers 4 and 6 havethe absorbing mechanisms 42, the tape T does not slip over them. Thus,the tape T is fed accurately. In other words, the transfer device Aensures that the tape T is fed to the exposure stage 51 a by displacingthe tape T on the rotational axis as well as by changing the feedingamount of the tape T.

The portion of the tape T that has passed through the exposure stage 51a is fed to the take-up slack absorber D2 by the first and secondtransfer rollers 4 and 6 (step S13). The feeding route is curved at thesecond transfer roller 6.

In the take-up slack absorber D2, the tension of the tape T is adjustedby the same way as that in the supply slack absorber D1. The tape T fedfrom the take-up slack absorber D2 is received by the second take-upguide roller 8, and is wound around the take-up reel B2 in the take-upreel rotating section 9 (step S14).

As described above, the transfer device A uses the first and secondtransfer rollers 4 and 6 to adjust the feeding amount of the tape T onthe exposure stage 51 a. In addition, the transfer device A uses thesecond supply guide roller 3 and the first take-up guide roller 7 toadjust the angle of the tape T on the exposure stage 51 a. With thetransfer device A, an amount at which the controller 10 needs todisplace the mask M is decreased greatly. This makes it possible toenhance the throughput of the exposure device 5 and to provide theprecise mask alignment process.

In the transfer device A, the tape T is pulled in the direction oppositeto the feeding direction, while being fed obliquely downward and upward.Consequently, the looseness of the tape T is optimized. The transferdevice A can feed the tape T to the exposure device 5 in the stablecondition. With this, circuit patterns on the mask M are transferred tothe surface of the tape T precisely. In addition, the tape T having beensubjected to the exposure process is wound around the take-up reel B2 inthe take-up reel rotating section 9 smoothly.

Modification of First Embodiment

Now, a description will be given below, of a transfer device accordingto a modification of the first embodiment, with reference to FIG. 8. Inthis description, the same reference numerals are given to the sameparts as those already described in the first embodiment, and duplicatedescription therefor is omitted.

Referring to FIG. 8, a transfer device A1 of the modification isequipped with a work connection mechanism 11 on a feeding route betweenthe supply reel rotating section 1 and the first supply guide roller 2.This work connection mechanism 11 is positioned higher than the firstsupply guide roller 2 and the supply slack absorber D1. As shown in FIG.8, the work connection mechanism 11 connects a tail end T2 a of a tapeT2 which is in course of an exposure process on the exposure stage 51 a(see FIG. 1) and a front end T1 a of a virgin tape T1. This mechanism 11includes a nonstick stage 11 a, a holding unit 11 c placed on the stage11 a and for holding the tape T1, and a crimp unit 11 b for thermallycrimping the tapes T1 and T2.

A way to connect the tapes T1 and T2 will be described. When the tape T2is about to run out, then an operator stops the operation of thetransfer device A1. An operator sets the tail end T2 a of the tape T2 onthe center of the stage 11 a. Note that the stage 11 a, which ispositioned above the supply slack absorber D1, is arranged close to thefirst supply guide roller 2 around which the processed tape T2 is wound.This arrangement enables the connection of the tapes T1 and T2 to befacilitated.

After setting the tail end T2 a, an operator presses it down by usingthe holding unit 11 c. An operator overlaps the tail end T2 a of thetape T2 and the front end T1 a of the tape T1. Then, the overlappedportions are connected by a thermal crimping process. With this workconnection mechanism 11, the tapes T1 and T2 are connected, therebyimproving the efficiency of the exposure process.

[Additional Modification]

The supply slack absorber D1 and the take-up slack absorber D2 as shownin FIGS. 1 and 2 may be implemented by any members as long as thetension of the tape T can be adjusted. For example, each of them may bean air dancer provided with a box (D1 a) through which the tape T is topasses and a fan for blowing air toward an opening of the box, therebyloosing the tape T within the box in a U shape.

Alternatively, each of the absorbers D1 and D2 may be a roller dancer inwhich a roller is placed on the tape T. In this case, since the weightof the roller is applied to the tape T, the tape T is pulled in thedirection opposite to the feeding direction, so that the tape T isloosened in a U shape.

In the first embodiment, the motors M2 and M3 are installed in the firstand second transfer rollers 4 and 6, respectively. However, the presentinvention is not limited to this configuration. Alternatively, everyroller and reel may have its own motor. In other words, each of thesupply reel rotating section 1, first supply guide roller 2, secondsupply guide roller 3, first take-up guide roller 7, second take-upguide roller 8 and take-up reel rotating section 9 may have its ownmotor. In this configuration, the supply reel rotating section 1 canfeed the tape T more smoothly, and the take-up reel rotating section 9can wind it more smoothly.

In the first embodiment, each of the first and second transfer rollers 4and 6 is provided with the absorbing holes 41 b or 61 b and theabsorbing mechanism 42 or 62. However, the present invention is notlimited to this configuration. Alternatively, each of the first andsecond guide rollers 2 and 3 and the first and second take-up guiderollers 7 and 8 may have the absorbing holes and absorbing mechanism.With this configuration, the tape T can be fed more smoothly.

The process stage 51 may not exclusively be applied to the exposuredevice 5. For example, it may be applied to an inspection device for thetape T, a hoop forming device or any other machines. If the processstage 51 is applied to a hoop forming device, then the take-up reelrotating section 9 may be replaced by a cutting unit.

Second Embodiment

Next, a description will be given blow, of a transfer device accordingto a second embodiment of the present invention, with reference to FIGS.9 to 12.

Referring to FIG. 9, a transfer device B according to a secondembodiment of the present invention is configured to send only the tapeT out of a tape T and a protective sheet S to an exposure stage 114 ofan exposure device E. An explanation will be given below, of the tape T,protective sheet S and exposure device E in this order.

[Structures of Tape T and Protective Sheet S]

The tape T is a film-shaped board. It is to be subjected to exposure,washing, etching and inspection processes, and to be used for anelectric circuit board. In this embodiment, the tape T undergoes anexposure process in an exposure device E. However, the tape T is notlimited to an object for an exposure process. Alternatively, it may bean object for any other processes. The tape T is, for example, 250 mmwide, 25 μm thin and 200 m long. In addition, it may have perforationson both sides.

The protective sheet S is made of a thin paper, and is used to protectthe surface of the tape T. The size of the protective sheet S is similarto that of the tape T.

[Structure of Exposure Device E]

The exposure device E is aimed at transferring patterns on a mask M tothe surface of the Tape T for each block.

The exposure device E is constituted by:

an optical source system 111;

a mask holding frame 112 for holding the mask M on the optical axis ofthe optical source system 111;

a projection optics 113 located a predetermined distance away from themask holding frame 112; and

an exposure stage 114 located on the optical axis of the projectionoptics 113.

Furthermore, the exposure device E includes image pick-up units 115 usedfor aligning alignment marks on the tape T and on the mask M, an imageprocess unit 116 for giving the captured marks to an image process, anda device controller 117.

The optical source system 111 emits light of predetermined wavelength,containing ultraviolet light. The optical source system 111 is composedof a lamp 111 a, an elliptic mirror 111 b for covering the bottomsurface of the lamp 111 a, a reflector 111 c for curving the path of thelight reflected from the elliptic mirror 111 b, and a lens 111 d foradjusting the illumination distribution of the light reflected from thereflector 111 c.

The mask holding frame 112 is adapted to support the mask M in anupright position so as to face the projection optics 113. This frame 112has a drive mechanism for displacing the mask M in the directionsperpendicular to the optical axis of the projection optics 113. The maskM has circuit patterns printed thereon, and these patterns are to beprojected to the surface of the tape T. In addition, the mask M has thealignment mark and identification mark at respective predeterminedlocations.

The projection optics 113 has an input side converging lens 113 a and anoutput side converging lens 113 b. The individual centers of lens andthe optical axis are aligned. When light enters the projection optics113, the light passes through both lens 113 a and 113 b, and irradiatesthe surface of the tape T. Note that an optical system of the presentinvention is not limited to the projection optics 113 of thisembodiment.

The exposure stage 114 is positioned a predetermined distance away fromthe projection optics 113, and has a stage surface 114 a extendingperpendicular to the optical axis of the light from the projectionoptics 113. Because of this arrangement, the lateral length of thetransfer system B can be shortened, so that it is made compact. Theexposure stage 114 is coupled to a pipe of a vacuum pump (not shown).This vacuum pump sucks the tape T, so that the tape T is fixed on theexposure stage 114. The tape T is fed to the exposure stage 114 for eachblock. Then, the alignment mark on the tape T is registered with that onthe mask M. Finally, the patterns on the mask M are transferred to thesurface of the tape M.

The image pick-up units 115 are aimed at capturing the images ofalignment marks on the tape T and on the mask M, and each of themincludes a half mirror and a CCD camera. The image pick-up units 115 aremoved away from the optical axis and fixed there, while the tape. T isexposed to the light.

The image process unit 116 sends data on the images from the imagepick-up units 115 to the device controller 117. The device controller117 controls a guide roller 131 c, stage guide rollers 132, 132 and aguide roller 133 b, based on the image data, so that the alignment markson the mask M and on the tape T are aligned. The device controller 117also controls the drive mechanism of the mask holding frame 112. Inaddition, the device controller 117 controls a guide roller 141 c of aprotective sheet transfer system 40. Therefore, the protective sheet Sis displaced on the rotational axis, so that the protective sheet S andthe tape T are aligned.

[Structure of Transfer Device B]

Now, a structure of the transfer device B will be described blow. In thefollowing description, orientations correspond to those in FIG. 10.

Referring to FIGS. 9 and 10, the transfer device B includes a supplyreel 20, a tape transfer system 30 for forwarding the tape T, aprotective sheet transfer system 40 for forwarding the protective sheetS, and a take-up reel 50.

(Supply Reel 20)

The supply reel 20 has the tape T wound therearound, and the protectivesheet S is put on the tape T. The supply reel 20 is, for example, 600 mmin diameter. The supply reel 20 rotates clockwise in response to therotation of a drive shaft (not shown) driven by a motor. The tape T andthe protective sheet S are fed from the supply reel 20 to the take-upreel 50 through different transfer systems, respectively.

(Tape Transfer System 30)

Referring to FIG. 10, the tape transfer system 30 feeds the tape T fromthe supply reel 20 to the take-up reel 50. Near a predetermined spot ofthis transfer route, the exposure device E is installed. The tapetransfer system 30 includes a first tension adjuster 131 providedbetween the supply reel 20 and the exposure device E, a pair of stageguide rollers 132, 132 for guiding the tape T to the exposure stage 114of the exposure device E, and a second tension adjuster 133 providedbetween the exposure device E and the take-up reel 50.

The first tension adjuster 131 is placed on the lower right of thesupply reel 20. It includes the guide rollers 131 b, 131 c, and a secondair dancer 131 a provided therebetween. The second air dancer 131 a hasa box shape, and contains the slack of the tape T between the guiderollers 131 b, 131 c, so that the tension of the tape T to be fed towardthe exposure device E is adjusted. As a result, the excess tension orlooseness of the tape T is prevented. The guide roller 131 c may be ableto be displaced on its rotational axis for the purpose of feeding thetape T to the exposure stage 114 precisely.

The stage guide rollers 132, 132 are arranged above and below theexposure stage 114, respectively, and they guide the tape T to the stagesurface 114 a of the exposure stage 114 in an exposure device E. Thetape T is fed downward between the stage guide rollers 132, 132 andalong the stage surface 114 a. The upper stage guide roller 132 islocated on the lower right of the guide roller 131 c. The stage guiderollers 132, 132 need to feed the tape T to the exposure stage 114precisely, and to prevent the tape T from slipping over the rollers.Accordingly, it is preferable that each of the stage guide rollers 132,132 has a vacuum suction mechanism. In addition, it is preferable thatthe stage guide rollers 132, 132 are made of resin such as ABS(acrylnitrile-butadiene-styrene copolymer). In this case, slightvibrations of the tape T are absorbed by the rollers.

As shown in FIG. 10, the second tension adjuster 133 is located underthe first tension adjuster 131, and includes guide rollers 133 b, 133 cand a third air dancer 133 a for adjusting the tension of the tape Tbetween the rollers 133 b, 133 c. The third air dancer 133 a has a boxshape, where a portion of the tape T which ranges between the guiderollers 133 b, 133 c is slackened in a U shape due to its weight. Thisis how the tension of the tape T is adjusted. As a result, the tape Tdoes not undergo excess loads or is not loosened greatly. The guideroller 133 b is located on the higher left of the lower stage guideroller 132. The guide roller 133 b may be displaced on its rotationalaxis for the purpose of feeding the tape T more precisely. If the guideroller 133 b is displaced in conjunction with the guide roller 131 c,then the misaligned amount and angle of the tape T can be corrected.

(Protective Sheet Transfer System 40)

The protective sheet transfer system 40 is configured to feed theprotective sheet S downward and in the different direction (left) fromthat in which the tape transfer system 30 forwards the tape T from thesupply reel 20. Further, the protective sheet transfer system 40 isadapted to forward the protective sheet S separately from the tape T.Hence, even if contaminants are adhered to the surface of the protectivesheet S, the contaminants never fly to the exposure stage 114 of theexposure device E in the tape transfer system 30. The protective sheettransfer system 40 feeds the protective sheet S from the supply reel 20to the take-up reel 50, and is equipped with a third tension adjuster141.

The third tension adjuster 141 is located on the lower left of thesupply reel 20, and it includes a pair of guide rollers 141 b, 141 c,and a first air dancer 141 a for adjusting the tension of the protectivesheet S between the guide rollers 141 b, 141 c. The first air dancer 141a has a box shape, where a portion of the protective sheet S that rangesbetween the guide rollers 141 b, 141 c is slackened due to its weight.As a result, the tension of the protective sheet S is adjusted. Thisprevents the protective sheet S from undergoing excess loads or frombeing loosened greatly. The slack length of the protective sheet Swithin the first air dancer 141 a is longer than that of the tape T inthe second or third air dancer 131 a or 133 a. The guide roller 141 b islocated on the lower left of the supply reel 20, and the guide roller141 c is located on the higher left of the take-up reel 50. Theprotective sheet transfer system 40 may have some other guide rollers.

(Structure of Guide Roller 141C)

Referring to FIG. 11, the guide roller 141 c is adapted to forward theprotective sheet S from the first air dancer 141 a to the take-up reel50 (see FIG. 10), and has a work position adjuster 142 for displacingthe protective sheet S in the directions of an arrow “b.” The guideroller 141 c includes a rotatable roller main body 149 for forwardingthe protective sheet S, a nut 145 displaced on the rotational axis ofthe roller main body 149 in response to the rotation of a ball screw144, a spline axis 146 displaced in conjunction with the nut 145, ashaft 147 displaced in conjunction with the spline axis 146, andbearings 148 arranged between the shaft 147 and the roller main body149.

The work position adjuster 142 displaces the roller main body 149 on therotational axis, thereby adjusting the position of the protective sheetS on the process stage 151. This work position adjuster 142 includes amotor M1, the ball screw 144, the nut 145, the spline axis 146 and theshaft 147.

The motor M1 as shown in FIG. 11 rotates clockwise or counterclockwisein response to control signals from the device controller 117. Then, theroller main body 149 is displaced in the directions of an arrow “a”while rotating. In response, the protective sheet S on the roller mainbody 149 is displaced in the directions of the arrow “b.” A rotationalamount of the motor M may be determined based on a signal from a firstsensor 151 a which senses the position of side edges of the tape Tand/or a signal from a second sensor 151 b which senses the position ofside edges of the protective sheet S. The casing 143 holds the motor M1,and is fixed at a predetermined location. In addition, the motor shaftM1 a penetrates the casing 143. The guide roller 141 c is held at apredetermined location by the casing 143.

The ball screw 144 is coupled to the motor shaft M1 a of the motor M1,and rotates in conjunction with it. Note that between the ball screw 144and the motor shaft M1 a, a reduction gear mechanism may be provided.The nut 145 mates with the ball screw 144. The nut 145 is contained inthe spline shaft 146, and is displaced in the directions of the arrow“a” while the ball screw 144 is rotating.

The spline shaft 146 as shown in FIG. 11 mates with the nut 145, and isdisplaced in the directions of the arrow “a” while rotating inconjunction with the nut 145. One end of the shaft 147 is coupled to thespline shaft 146. In addition, the shaft 147 has bearings 148 at bothends, and is displaced on the rotational axis in conjunction with thespline axis 146 while rotating. The roller main body 149 is displaced inthe directions of the arrow “a” in conjunction with the bearings 148,and has a bobbin shape with flanges. The roller surface 141 a of theroller main body 149 is made of synthetic resin so as to absorb slightvibrations.

As described above, once the motor M1 rotates, the roller main body 149is displaced on the rotational axis in conjunction with the ball screw144, spline shaft 146, shaft 147 and shaft 148. In this way, the sideedges of the protective sheet S can be adjusted. The guide roller 141 ccan adjust the position of the protective sheet S with respect to theposition of the tape T precisely.

The structure of the guide roller 141 c is not limited to that shown inFIG. 11. Alternatively, the motor M1 rotates the shaft 147 only, and theguide roller 141 c is rotated by a different motor or a linear slidemechanism (not shown). Both the guide rollers 131 c and 133 b may be thesame structure as that of the guide roller 141 c.

(Take-Up Reel 50)

The take-up reel 50 is placed on one side of the exposure stage 114 andbelow the supply reel 20. This arrangement makes it possible to shortenthe lateral length of the transfer device B, thereby making it compact.The take-up reel 50 is rotated clockwise by a motor. Thus, the take-upreel 50 winds the tape T forwarded by the tape transfer system 30 andthe protective sheet S forwarded by the protective sheet transfer system40.

The tape T and the protective sheet S that are to be wound by thetake-up reel 50 are adjusted to have the same tension by the secondtension adjuster 133 and the third tension adjuster 141, respectively.Accordingly, the cross-section of the take-up reel 50 around which boththe tape T and the protective sheet S are wound has a shape of asubstantially perfect circle. Each of the transfer routes of the tape Tand the protective sheet S makes up a closed loop through the supplyreel 20 and take-up reel 50. Therefore, this structure does not need atake-up reel dedicated for the protective sheet.

Close to the take-up reel 50, the first sensor 151 a for sensing theposition of side edge of the tape T and the second sensor 151 b forsensing the position of side edges of the protective sheet S may beprovided. If the tape T and the protective sheet S are misaligned on thetake-up reel 50 along the rotational axis, then the tape T is likely tobe damaged, or contaminants may be adhered to the surface of the tape T.Hence, the first sensor 151 a and second sensor 151 b sense thepositions of side edges of the tape T and the protective sheet S,respectively. Then, their edge positions are adjusted precisely bydisplacing the guide roller 141 c on its rotational axis based on thesensing result.

[Operations of Exposure Device E and Transfer Device B]

A description will be given below, of operations of the exposure deviceE and the transfer device B with reference to the transfer routes of thetape T and the protective sheet S.

First, an operator sets the supply reel 20 around which both the tape Tand the protective sheet S are wound and the empty take-up reel 50 tothe transfer device B. The supply reel 20 forwards the tape T toward thetape transfer system 30 as well as the protective sheet S toward theprotective sheet transfer system 40.

The tape T fed from the supply reel 20 is forwarded to the first tensionadjuster 131. The first tension adjuster 131 feeds the tape T in theright direction by using the guide rollers 131 b, 131 c, while thesecond air dancer 131 a is adjusting the tension of the tape T.Following this, the adjuster 131 feeds the tape T toward the exposuredevice E. The second air dancer 131 a maintains the tension of the tapeT in balance on the upstream side of the exposure device E.

In the tape transfer system 30, the feeding route of the tape T iscurved at the stage guide rollers 132, 132. The tape T is fed downwardtherebetween. The tape transfer system 30 feeds the tape T for eachblock which is to be processed by the exposure device E once. The tapetransfer system 30 controls the stage guide rollers 132, 132individually, so that the position of the tape T is adjusted. If thetape T has a thin, wide shape, then the feeding speed of the tape T foreach block is likely to be varied. This makes it difficult to positionthe tape T precisely. However, in this embodiment, such a disadvantageis prevented by adjusting the tension of the tape T within the firsttension adjuster. If the tape T is angled on the exposure stage 114,then the system 30 displaces the guide rollers 131 c and 133 b on theirrotational axes. This enables the adjustment of the angle of the tape T.

The system 30 positions the tape T on the exposure stage 114 of theexposure device E and, then fixes it. Following this, the exposuredevice E irradiates the surface of the tape T with light. After theexposure process, the system 30 forwards the processed portion of thetape T to where it is not affected by a next exposure process.

The lower stage guide roller 132 and the guide roller 133 b guide thetape T. The feeding route of the tape T is curved at the stage guideroller 132. The guide rollers 133 b, 133 c guide the tape T in the leftdirection and over the second tension adjuster 133, while the third airdancer 133 a is adjusting the tension of the tape T. Finally, thetake-up reel 50 winds the tape T. While take-up reel 50 is winding thetape T, the first sensor 151 a may sense the position of side edges ofthe tape T.

On the other hand, the supply reel 20 forwards the protective sheet S tothe third tension adjuster 141. The feeding route of the protectivesheet S is curved at the guide roller 141 b, and the protective sheet Sis fed in the right direction. The first air dancer 141 a adjusts thetension of the protective sheet S and, then feed it to the take-up reel50. While the take-up reel 50 is winding the protective sheet S, thesecond sensor 151 b may sense the position of side edges of theprotective sheet S. The device controller 117 sends control signals tothe motor M1 of the guide roller 141 c in order to align the side edgesof the protective sheet S with those of the tape T. When the guideroller 141 c is displaced on the rotational axis, the protective sheet Sis also displaced on the rotational axis. Finally, the take-up reel 50winds the displaced protective sheet S and the tape T.

In this way, the take-up reel 50 winds both the protective sheet S andthe tape T which have the same tension. Thus, they are wound in balance.When the exposure device E gives an exposure process to the tape T orwhen the protective sheet S is put on the tape T, the tension of thetape T used to be varied. However, the transfer device E of the secondembodiment uses the second tension adjuster 133 to maintain the tensionof the tape T. Therefore, the transfer device E can feed the tape T inthe stable condition. Consequently, the cross-section of the take-upreel 50 around which both the tape T and the protective sheet S arewound is perfectly circular, and both edges of the tape T and those ofthe protective sheet S are aligned. Furthermore, since the tension ofthe protective sheet S is adjusted by the third tension adjuster 141,this adjustment process does not affect feeding of the tape T.

In the transfer device B of the second embodiment, the differenttransfer systems (tape transfer system 30 and protective sheet transfersystem 40) feed the tape T and the protective sheet S, separately.Therefore, no any accessory members are required.

The supply reel 20 and the take-up reel 50 are arranged on one side ofthe exposure stage 114. This arrangement enables the lateral length ofthe transfer device E to be shortened, thereby making the devicecompact.

The protective sheet transfer system 40 is located on the side oppositeto the tape transfer system 30 with respect to the supply reel 20. Thus,even if contaminants are adhered to the surface of the protective sheetS, the contaminants are less likely to fly to the tape transfer system30.

The exposure device E gives an exposure process to the tape T of whichtension has been adjusted. It is therefore possible to conduct thestable, accurate exposure process. The tensions of the tape T and theprotective sheet S are kept the same by the second and third tensionadjusters 133 and 141, respectively. Therefore, the take-up reel 50 canwind them in balance.

The tape transfer system 30 and the protective sheet transfer system 40are provided independently. Hence, even if the protective sheet S is cutaccidentally, feeding of the tape T is not affected. This makes itpossible to improve the reliability of the tape T.

Up to this point, the transfer device B of the second embodiment hasbeen described. However, the present invention is not limited to thissecond embodiment. Needless to say, various modifications and variationsof the embodiment may be allowed.

FIGS. 12A to 12C show a modification of the transfer device and theexposure device of the second embodiment. In the transfer device B ofthe second embodiment, the supply reel 20 and the take-up reel 50 rotateclockwise (see FIG. 10). However, the present invention is not limitedto this configuration.

Referring to FIG. 12A showing a transfer device B1, a supply reel 20Arotates clockwise, while the take-up reel 50A rotates counterclockwise.

Referring to FIG. 12B showing a transfer device B2, both a supply reel20B and a take-up reel 50B rotate counterclockwise.

Referring to FIG. 12C showing a transfer device B3, a supply reel 20Crotates counterclockwise, while a take-up reel 50C rotates clockwise.

In the transfer device B of the second embodiment, the guide roller 131c, guide roller 133 b and guide roller 141 c can be displaced on theirrotational axes. However, the present invention is not limited to thisconfiguration. Alternatively, any of the other rollers may be displacedas well.

From the aforementioned explanation, those skilled in the art ascertainthe essential characteristics of the present invention and can make thevarious modifications and variations to the present invention to adaptit to various usages and conditions without departing from the spiritand scope of the claims.

1. A transfer device for feeding a tape-shaped work to a process stagestanding in an upright position, the transfer device being placed on oneside of the process stage, said transfer device comprising: a supplyreel around which the work and a protective sheet are wound, the supplyreel for feeding the work and the protective sheet therefrom; a take-upreel for winding the work and the protective sheet that have been fedfrom the supply reel, the take-up reel being located below the supplyreel; and a work feeding mechanism for forwarding the work from thesupply reel to the take-up reel through the process stage.
 2. A transferdevice for feeding a tape-shaped work that is to be subjected to aprocess on a process stage standing in an upright position, saidtransfer device comprising: a supply reel rotating section for feedingthe work by rotating a supply reel around which the work is wound; firstand second supply guide rollers for guiding the work fed from the supplyreel rotating section; a supply slack absorber for adjusting a tensionof the work between the first and second supply guide rollers, thesupply slack absorber being located therebetween; first and secondtransfer rollers for feeding, along the process stage, the work fed fromthe second supply guide roller, the first and second transfer rollersbeing arranged above and below the process stage, respectively; firstand second take-up guide rollers for guiding the work fed from thesecond transfer roller; a take-up slack absorber for adjusting a tensionof the work between the first and second take-up guide rollers, thetake-up slack absorber being located therebetween; and a take-up reelrotating section for winding the work fed from the second take-up guideroller by rotating a take-up reel; the supply reel rotating sectionbeing located higher than the first supply guide roller; the secondsupply guide roller being located as high as or lower than the firstsupply guide roller, and higher than the first transfer roller; thetake-up reel rotating section being located higher than the secondtake-up guide roller; the second take-up guide roller being located ashigh as or higher than the first take-up guide roller, and lower thanthe take-up reel rotating section.
 3. The transfer device according toclaim 2, wherein each of the second supply guide roller and the firsttake-up guide roller comprises a work position adjuster for displacingthe work on its rotational axis, based on a misaligned amount of thework on the process stage.
 4. The transfer device according to claim 2,wherein each of the first transfer roller and the second transfer rollerhas a roller main body made of synthetic resin.
 5. The transfer deviceaccording to claim 2, further comprising a removable work connectionmechanism for connecting a tail end of the work that is undergoing aprocess on the process stage and a front end of another work, the workconnection mechanism being provided between the supply reel rotatingsection and the first supply guide roller.
 6. The transfer deviceaccording to claim 2, wherein the process stage comprises an exposurestage on which patterns formed on a mask are transferred to a surface ofthe work fed for each block by the transfer device.
 7. The transferdevice according to claim 6, wherein when the work is misaligned with apredetermined position on the process stage by a threshold or less, themisaligned amount is adjusted to substantially zero by displacing themask, and wherein when the work is misaligned with the predeterminedposition on the process stage by more than the threshold, each of thesecond supply guide roller and the first take-up guide roller isdisplaced on its rotational axis.
 8. The transfer device according toclaim 6, wherein when the work is misaligned with a predeterminedposition on the process stage by a threshold or less, the misalignedamount is adjusted to substantially zero by displacing the mask, andwherein when the work is misaligned with the predetermined position onthe process stage by more than the threshold, an amount at which thefirst transfer roller and the second transfer roller feed the work isadjusted.
 9. The transfer device according to claim 2, wherein each ofthe first and second transfer rollers comprises a plurality of absorbingholes and an absorbing mechanism coupled to the absorbing holes, and thework is sucked onto the absorbing holes by the absorbing mechanism. 10.The transfer device according to claim 2, wherein each of the first andsecond supply guide rollers and the first and second take-up guiderollers comprises a plurality of absorbing holes and an absorbingmechanism coupled to the absorbing holes, and the work is sucked ontothe absorbing holes by the absorbing mechanism.
 11. A transfer devicefor feeding a tape-shaped work to a process stage standing in an uprightposition, the transfer device being located on one side of the processstage, said transfer device comprising: a supply reel around which thework and the protective sheet are wound, the supply reel for feeding thework and the protective sheet therefrom; a take-up reel for winding thework and the protective sheet that have been fed from the supply reel,the take-up reel being located below the supply reel; a work feedingmechanism for feeding the work from the supply reel to the take-up reelthrough the process stage; and a protective sheet feeding mechanism forfeeding the protective sheet from the supply reel to the take-up reel,the protective sheet being forwarded on the side opposite to the processstage with respect to the supply reel.
 12. The transfer device accordingto claim 11, wherein the protective sheet feeding mechanism is providedwith a protective sheet tension adjuster comprising: a first roller forguiding the protective sheet from the supply reel; a second roller forguiding the protective sheet to the take-up roller; and a first airdancer for adjusting a tension of the protective sheet between the firstroller and the second roller.
 13. The transfer device according to claim11, wherein a route on which the work is fed from the supply reel to thetake-up reel through the process stage makes a closed loop, and a routeon which the protective sheet is fed from the supply reel to the take-upreel makes a closed loop.
 14. The transfer device according to claim 11,further comprising: a first sensor for sensing a position of side edgesof the work fed from the process stage to the take-up reel, and a secondsensor for sensing a position of side edges of the protective sheet fedfrom the supply reel to the take-up reel, wherein the side edges of thework are aligned with those of the protective sheet, based on sensingresults of the first and second sensors, and the work and the protectivesheet are then wound by the take-up reel.
 15. The transfer deviceaccording to claim 11, wherein the work feeding mechanism comprises afirst tension adjuster which adjusts a tension of the work between thesupply reel and the process stage and which is placed therebetween, anda second tension adjuster which adjusts a tension of the work betweenthe process section and the take-up reel and which is placedtherebetween, wherein the first tension adjuster comprises a thirdroller for guiding the work fed from the supply reel, a fourth rollerfor guiding the work to the process stage, and a second air dancer foradjusting the tension of the work between the third roller and thefourth roller, and wherein the second tension adjuster comprises a fifthroller for guiding the work from the process stage, a sixth roller forguiding the work to the take-up reel, and a third air dancer foradjusting the tension of the work between the fifth roller and the sixthroller.
 16. The transfer device according to claim 12, wherein each of aroute on which the work is fed from the supply reel to the take-up reelthrough the process stage and a route on which the protective sheet isfed from the supply reel to the take-up reel makes a closed loop. 17.The transfer device according to claim 13, further comprising a firstsensor for sensing a position of side edges of the work fed from theprocess stage to the take-up reel, and a second sensor for sensing aposition of side edges of the protective sheet fed from the supply reelto the take-up reel, wherein the side edges of the work are aligned withthose of the protective sheet, based on sensing results of the firstsensor and the second sensor, and the work and the protective sheet arethen wound by the take-up reel.